Pure and Applied Chemistry, 1987, Volume 59, No. 2, pp. 229-244

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Pure Appl. Chem., 1987, Vol. 59, No. 2, pp. 229-244

doi:10.1351/pac198759020229

Distribution analysis of major and trace elements through semiconductor layers of changing matrix using secondary ion mass spectrometry (SIMS)

A. A. Galuska and G. H. Morrison