Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 633-644
doi:10.1351/pac198860050633
Plasma deposition of amorphous silicon films: an overview on some open questions
P. Capezzuto and G. Bruno
Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 633-644
doi:10.1351/pac198860050633
P. Capezzuto and G. Bruno