Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 703-708
doi:10.1351/pac198860050703
Plasma and gaseous etching of compounds of Groups III-V
D. E. Ibbotson
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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 703-708
doi:10.1351/pac198860050703
D. E. Ibbotson