Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 733-740
doi:10.1351/pac198860050733
Amorphous Si and Si-based alloys from glow-discharge plasma
A. Matsuda
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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 733-740
doi:10.1351/pac198860050733
A. Matsuda