Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 747-751
doi:10.1351/pac198860050747
Excited states of plasmas for steel surface nitriding and TiN deposition
A. Ricard, G. Henrion, H. Michel and M. Gantois
Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 747-751
doi:10.1351/pac198860050747
A. Ricard, G. Henrion, H. Michel and M. Gantois