Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 781-794
doi:10.1351/pac198860050781
Ionized cluster beam (ICB) deposition and processes
T. Takagi
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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 781-794
doi:10.1351/pac198860050781
T. Takagi