Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 795-808
doi:10.1351/pac198860050795
Expanding plasma used for plasma deposition
G. M. W. Kroesen, C. J. Timmermans and D. C. Schram
Adobe Acrobat Reader
Our PDF files are best viewed with Adobe Acrobat Reader 6 or higher.
