Pure and Applied Chemistry, 1990, Volume 62, No. 1, pp. 89-101

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Pure Appl. Chem., 1990, Vol. 62, No. 1, pp. 89-101

doi:10.1351/pac199062010089

Role of high temperature chemistry in CVD (chemical vapor deposition) processing

K. E. Spear and R. R. Kirkx

Full text - pdf 1026 kB

All articles from the Sixth International Conference on High Temperatures - Chemistry of Inorganic Materials at High Temperatures, Gaithersburg, Maryland, USA, 3–7 April 1989.