Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 709-713
doi:10.1351/pac199264050709
Dual atom beam studies of etching and related surface chemistries
J. W. Coburn
Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 709-713
doi:10.1351/pac199264050709
J. W. Coburn