Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 725-730
doi:10.1351/pac199264050725
Novel approaches to plasma deposition of amorphous silicon-based materials
G. Bruno, P. Capezzuto and G. Cicala
Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 725-730
doi:10.1351/pac199264050725
G. Bruno, P. Capezzuto and G. Cicala