Pure and Applied Chemistry, 1996, Volume 68, No. 5, pp. 1011-1015, Other PAC articles by these authors

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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1011-1015

http://dx.doi.org/10.1351/pac199668051011

Future prospects for dry etching

K. Suzuki and Naoshi Itabashi

Individual author index pages

Other PAC articles by these authors

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