Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1017-1022
doi:10.1351/pac199668051017
From molecules to particles in silane plasmas
A. A. Howling, C. Courteille, J.-L. Dorier, L. Sansonnens and Ch. Hollenstein
All articles from the 12th International Symposium on Plasma Chemistry, Minneapolis, USA, 21–26 August 1995.