Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1055-1058
doi:10.1351/pac199668051055
Radio frequency inductive discharge source design for large area processing
A. E. Wendt and L. J. Mahoney
All articles from the 12th International Symposium on Plasma Chemistry, Minneapolis, USA, 21–26 August 1995.