Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1121-1126
doi:10.1351/pac199668051121
Formation of dense submicronic clouds in low pressure Ar-SiH4 RF reactor: Diagnostics and growth processes from monomers to large size particulates
A. Bouchoule, L. Boufendi, J. Hermann, A. Plain, T. Hbid, G. Kroesen, E. Stoffels and W. W. Stoffels
All articles from the 12th International Symposium on Plasma Chemistry, Minneapolis, USA, 21–26 August 1995.