Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1143-1149
doi:10.1351/pac199668051143
Plasma deposition of amorphous silicon alloys from fluorinated gases
G. Cicala, G. Bruno and P. Capezzuto
All articles from the 12th International Symposium on Plasma Chemistry, Minneapolis, USA, 21–26 August 1995.