Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 453-457
"Simple" diagnostics for characterization of low-pressure chemically active plasmas
Abstract: In the current paper, the "simple" diagnostics for characterization of nonequilibrium chemically active plasmas are discussed. As to experimental methods, "simple" noninvasive spectroscopic methods of ionizing and recombining plasma characterization have been emphasized. The word "simple" in the title is presented in quotes, which means that the methods are assumed to be simple only conditionally. In order to be sure that the measurements indeed provide correct information on the plasma parameters, a detailed understanding of kinetics of each particular plasma source is required. Moreover, the validity of spectroscopic methods should be checked by independent diagnostic techniques.