Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 465-469
Excilamps as efficient UVVUV light sources
Abstract: Operating parameters of powerful UV and vacuum ultraviolet (VUV) excilamps with different discharge geometry excited by capacitive discharge, barrier discharge, glow discharge, and UV-preionized discharge were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was obtained in rare gas or in rare gasF2 (Br2, CH3Br, Cl2, Br2, HCl, I2, NF3) mixtures.