Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 465-469
doi:10.1351/pac200274030465
Excilamps as efficient UVVUV light sources*
Victor F. Tarasenko
High Current Electronics Institute, 4, Akademichesky Ave., Tomsk, 634055, Russia
Abstract:
Operating parameters of powerful UV and vacuum ultraviolet (VUV) excilamps with different discharge geometry excited by capacitive discharge, barrier discharge, glow discharge, and UV-preionized discharge were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was obtained in rare gas or in rare gasF2 (Br2, CH3Br, Cl2, Br2, HCl, I2, NF3) mixtures.
All articles from the 15th International Symposium on Plasma Chemistry, Orléans, France, 9–13 July 2001.