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Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 465-469

Excilamps as efficient UV­VUV light sources

Victor F. Tarasenko

High Current Electronics Institute, 4, Akademichesky Ave., Tomsk, 634055, Russia

Abstract: Operating parameters of powerful UV and vacuum ultraviolet (VUV) excilamps with different discharge geometry excited by capacitive discharge, barrier discharge, glow discharge, and UV-preionized discharge were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was obtained in rare gas or in rare gas­F2 (Br2, CH3Br, Cl2, Br2, HCl, I2, NF3) mixtures.