Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 471-474
Plasma synthesis of catalytic thin films
Abstract: Plasma sputter deposition is introduced in the field of catalyst preparation. It is shown that growth kinetics and morphologies are determined by ion to neutral flux ratio and kinetic energies of sputtered atoms. Catalytic activity of such catalysts compares very well with classical catalysts.