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2002, Vol. 74, Issue 3

15th International Symposium on Plasma Chemistry, Orléans, France, 9–13 July 2001

This conference is part of the Plasma Chemistry series.
Energy transfers by long-lived species in glows and afterglows
S. De Benedictis and G. Dilecce
p. 317 [Details + Abstract] [Full text - pdf 273 kB]
New approaches in thermal plasma technology
Joachim Heberlein
p. 327 [Details + Abstract] [Full text - pdf 210 kB]
Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressure
Charles H. Kruger, Christophe O. Laux, Lan Yu, Denis M. Packan and Laurent Pierrot
p. 337 [Details + Abstract] [Full text - pdf 562 kB]
Plasma sterilization. Methods and mechanisms
Michel Moisan, Jean Barbeau, Marie-Charlotte Crevier, Jacques Pelletier, Nicolas Philip and Bachir Saoudi
p. 349 [Details + Abstract] [Full text - pdf 310 kB]
Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devices
Pere Roca i Cabarrocas, Anna Fontcuberta i Morral, Sarra Lebib and Yves Poissant
p. 359 [Details + Abstract] [Full text - pdf 391 kB]
Plasma processing and chemistry
Daniel C. Schram
p. 369 [Details + Abstract] [Full text - pdf 291 kB]
Study for plasma etching of dielectric film in semiconductor device manufacturing. Review of ASET research project
Makoto Sekine
p. 381 [Details + Abstract] [Full text - pdf 494 kB]
Diagnostics of etching plasmas
Jean-Paul Booth
p. 397 [Details + Abstract] [Full text - pdf 177 kB]
Role of ions in SiO2 deposition with pulsed and continuous helicon plasmas
Christine Charles
p. 401 [Details + Abstract] [Full text - pdf 212 kB]
Diagnostics and insights on PECVD for gas-barrier coatings
Mariadriana Creatore, Fabio Palumbo and Riccardo d'Agostino
p. 407 [Details + Abstract] [Full text - pdf 227 kB]
Plasma-assisted production of hydrogen from hydrocarbons
Maxim Deminsky, Victor Jivotov, Boris Potapkin and Vladimir Rusanov
p. 413 [Details + Abstract] [Full text - pdf 210 kB]
Ion-induced damage and annealing of silicon. Molecular dynamics simulations
David Humbird and David B. Graves
p. 419 [Details + Abstract] [Full text - pdf 238 kB]
Plasma treatment of textile fibers
Hartwig Höcker
p. 423 [Details + Abstract] [Full text - pdf 297 kB]
Generation of thermal plasmas in liquid-stabilized and hybrid dc-arc torches
Milan Hrabovský
p. 429 [Details + Abstract] [Full text - pdf 235 kB]
Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials
T. Ishigaki, N. Okada, N. Ohashi, H. Haneda and T. Sakuta
p. 435 [Details + Abstract] [Full text - pdf 265 kB]
Splat formation in plasma-spray coating process
Javad Mostaghimi and Sanjeev Chandra
p. 441 [Details + Abstract] [Full text - pdf 197 kB]
Ultrashort pulsed barrier discharges and applications
Ken Okazaki and Tomohiro Nozaki
p. 447 [Details + Abstract] [Full text - pdf 297 kB]
"Simple" diagnostics for characterization of low-pressure chemically active plasmas
D. K. Otorbaev
p. 453 [Details + Abstract] [Full text - pdf 139 kB]
Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR
Yi-Kang Pu, Zhi-Gang Guo, Zheng-De Kang, Jie Ma, Zhi-Cheng Guan, Guang-Yu Zhang and En-Ge Wang
p. 459 [Details + Abstract] [Full text - pdf 195 kB]
Excilamps as efficient UV­VUV light sources
Victor F. Tarasenko
p. 465 [Details + Abstract] [Full text - pdf 181 kB]
Plasma synthesis of catalytic thin films
A.-L. Thomann, J. P. Rozenbaum, P. Brault, C. Andreazza, P. Andreazza, B. Rousseau, H. Estrade-Szwarckopf, A. Berthet, J. C. Bertolini, F. J. Cadete Santos Aires, F. Monnet, C. Mirodatos, C. Charles and R. Boswell
p. 471 [Details + Abstract] [Full text - pdf 196 kB]
Superhard nanocomposite coatings. From basic science toward industrialization
S. Veprek and M. Jilek
p. 475 [Details + Abstract] [Full text - pdf 247 kB]
Clustering phenomena in low-pressure reactive plasmas. Basis and applications
Y. Watanabe, M. Shiratani and K. Koga
p. 483 [Details + Abstract] [Full text - pdf 188 kB]
How to exploit ion-induced stress relaxation to grow thick c-BN films
P. Ziemann, H.-G. Boyen, N. Deyneka, P. Widmayer and F. Banhart
p. 489 [Details + Abstract] [Full text - pdf 168 kB]

IUPAC Technical Reports and Recommendations

Definitions of basic terms relating to polymer liquid crystals (IUPAC Recommendations 2001)
M. Barón and R. F. T. Stepto
p. 493 [Details + Abstract] [Full text - pdf 400 kB]