CrossRef enabled

PAC Archives

Archive →

Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 483-487

http://dx.doi.org/10.1351/pac200274030483

Clustering phenomena in low-pressure reactive plasmas. Basis and applications

Y. Watanabe, M. Shiratani and K. Koga

Faculty of Information Science and Electrical Engineering, Kyushu University, Fukuoka 812-8581, Japan

CrossRef Cited-by theme picture

CrossRef Cited-by Linking

  • Shiratani Masaharu, Hatozaki Kosuke, Hashimoto Yuji, Kim Yeonwon, Seo Hyunwoong, Kamataki Kunihiro, Uchida Giichiro, Itagaki Naho, Koga Kazunori: Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition. MRS Proc. 2012, 1426. <http://dx.doi.org/10.1557/opl.2012.1245>
  • Nakamura William Makoto, Matsuzaki Hidefumi, Sato Hiroshi, Kawashima Yuuki, Koga Kazunori, Shiratani Masaharu: High rate deposition of highly stable a-Si:H films using multi-hollow discharges for thin films solar cells. Surface Coatings and Technology 2010, 205, S241. <http://dx.doi.org/10.1016/j.surfcoat.2010.07.081>
  • Shiratani Masaharu, Nakamura William Makoto, Miyahara, Hiroommi, Koga Kazunori: Control of Nanostructure of Plasma CVD Films for Third Generation Photovoltaics. J Phys Conf Ser 2007, 86, 012021. <http://dx.doi.org/10.1088/1742-6596/86/1/012021>
  • Kim Kyo-Seon, Kim Dong-Joo, Qiu Zhao Qian: Numerical analysis on particle coating by the pulsed plasma process. Chem Eng Set 2006, 61, 3278. <http://dx.doi.org/10.1016/j.ces.2005.12.003>
  • Koga K., Uehara R., Kitaura Y., Shiratani M., Watanabe Y., Komori A.: Carbon Particle Formation Due to Interaction Between H<tex>$_2$</tex>Plasma and Carbon Fiber Composite Wall. IEEE Trans Plasma Sci 2004, 32, 405. <http://dx.doi.org/10.1109/TPS.2004.828129>
  • Koga Kazunori, Kaguchi Naoto, Shiratani Masaharu, Watanabe Yukio: Correlation between volume fraction of clusters incorporated into a-Si:H films and hydrogen content associated with Si–H[sub 2] bonds in the films. J Vac Sci Technol A 2004, 22, 1536. <http://dx.doi.org/10.1116/1.1763905>
  • SHIRATANI Masaharu, KOGA Kazunori, WATANABE Yukio: Journal of The Surface Finishing Society of Japan 2003, 54, 931. <http://dx.doi.org/10.4139/sfj.54.931>